Inspection
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Mini vreteno v meracej technike
Presné polohovanie senzora pomocou miniatúrneho guľôčkového prevodu v meracom systéme.
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Precision cross table for wafer inspection
A precision cross table enables simultaneous inspection of silicon wafers from above and below.
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Precision cross table with cleanroom energy chain
Precision cross table with innovative cleanroom-compatible energy supply system for inspecting wafers.